Laser wavelength effects on the charge state resolved ion energy distributions from laser-produced Sn plasma

نویسندگان

  • Russell A. Burdt
  • Yezheng Tao
  • Mark S. Tillack
  • Sam Yuspeh
  • Nek M. Shaikh
  • Eli Flaxer
  • Farrokh Najmabadi
چکیده

distributions from laser-produced Sn plasma Russell A. Burdt, Yezheng Tao, Mark S. Tillack, Sam Yuspeh, Nek M. Shaikh, Eli Flaxer, and Farrokh Najmabadi Center for Energy Research, University of California San Diego, La Jolla, California 92093, USA Electrical and Computer Engineering, University of California San Diego, La Jolla, California 92093, USA AFEKA Tel-Aviv Academic College of Engineering, 69107 Tel-Aviv, Israel

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Determination of Charge State, Energy and Angular Distributions of Tin Ions Emitted from Laser Produced Plasma Based Euv Sources. Determination of Charge State, Energy and Angular Distributions of Tin Ions Emitted from Laser Produced Plasma Based Euv Sources

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تاریخ انتشار 2010